Property |
Specification |
Tolerance |
| Angle between S1 and S3 | 90.0¢X |
¡Ó 0.2¢X |
| Angle (customized) |
| Angle between S1 and S5 |
90.00¢X |
¡Ó 0.25¢X |
| Angle (customized) |
| Angle between S3 and S5 |
90.00¢X |
¡Ó 0.25¢X |
| Parallelism between S1 and S2 (relative angle) |
0.0¢X |
< 0.1¢X |
| Parallelism between S3 and S4 (relative angle) |
0.0¢X |
< 0.1¢X |
| Parallelism between S5 and S6 (relative angle) |
0.0¢X |
< 1¢X |
| Chip-outs in S3, S4, S5 and S6 |
none extending >0.2 mm from any edge |
none extending >0.2 mm from any edge |
¡½ The angle between S3 and S5 is defined by the dicing machine. The typical value is less than 0.25¢X.
¡½ Parallelism between S3 & S4 (relative angle): < 1', checked by autocollimator.
¡½ The angle between S5 and S6 is also defined by the dicing machine. The typical value is less than 1¢X.
¡½ The parallelism (relative angle) between S1 & S2 is calculated by taking the difference between ¡çS1S3 and ¡çS2S3. |
Waveguide > Dimension